Semiconductor AMHS Solution

Semiconductor AMHS Solution

OHT(Over Head Hoist Transport) System

  • Introduction

300mm半导体 Fab 构成包括 Interbay 与 Intrabay。半导体 Fab 中,使用 Interbay 和 Intrabay 这两个 Bay 概念性 Layout是由于半导体工程复杂且有很多重复工程要完成,因此在不同工程或不同设备间进行物流转运时,需要构成复杂的转运系统,目前对这些要求事项通过AMHS的整合,体现了一个工程化的系统 (One Fab Solution),以适合半导体工程的特殊性而开发。
最近 AMHS将 Interbay 和 Interbay 进行整合后,为将WIP(Work In Process)按 各个 工程别 储存 Stocker System的功能可以位于OHT的 Path(Track)上。随着将 STB(Side Track Buffer)和 UTB(under Track Buffer)的储藏功能扩大使用,将 Footprint的 减少和 Delivery time明显地减少,将搬送效率极大化。
OHT System在 Clean room 内采用(Ceiling Transport) 方式,所以基本上采用了CPS(Contactless Power Supply)方式,通过非接触电源供应体现了高速搬送,并遵守 Cleanroom Standard(FED-209E) 和 SEMI E82(IBSEM) Standard。

  • Specification
  • Features and Benefits

Non-stop Merge & Diverge

Allows non-stop routing from bay to bay(between Interbay and Intrabay) for delivery time and maximum moves.

Easy to Expand

Module design lets you add branch rail for no downtime.(Bypass & Blocking routing by OHTC)

Real time scheduling

Allows to assign priority vehicle dispatch for process priority and line issues Shortest routing algorism Intelligent shortest routing path, minimized delivery time.

Communication

SECS / HSMS / GEM compatible

300mm Stocker System

  • Introduction

 由于300mm半导体 Fab工程复杂,而且还会形成很多重复工程,各个工程间或设备之间的工程时间(Process time)不同,因此在完成整个工程之前,有很多 WIP(Work In Process)被储存在Fab内。这将使各工程设备达到最高效率最大生产能力。
为储存WIP的 300mm Stocker System 不仅具有储存功能,而且通过 OHT和 Auto In-Out Port的 Interface功能和 Manual Port,具备了 Operator和 WIP的出入库功能。
最近,随着 300mm One Fab Solution的扩大,WIP的储存功能分散为 STB(Side Track Buffer), UTB(Under Track Buffer)但在特定部分应正确的使用。 随着超微工程技术的发展,为了防止FOUP内的 Wafer污染,还采用N2 Purge功能。
遵守Cleanroom Standard(FED-209E) 和 SEMI E88(Stocker SEM) Standard。

  • Specification
  • Features and Benefits

Compact Footprint

Available in configurations up to 4.2 x 5m module.
Minimized dead space and full use of vertical space.

High Cycle time

High speed robot move with 12second average cycle time (4.2m x 5mH standard module, 120cell base)

Standards

Compliance with current SEMI standards ensures interoperation with other cleanroom equipment.

Automatic teaching & alignment

When installing the Stocker system is very short and easy.
Crane robot has the auto teaching function.
When the Crane robot stores FOUP in shelf, Crane robot has self alignment function.

Communication

SECS / HSMS / GEM compatible

Interflow Stocker System

  • Introduction

  由于300mm半导体 Fab 复杂的工程特性, Process EQ为了有效率的配置,一般都是有复层的Clean room组成。
Clean room为最大的活用Footprint 正在摸索多样的方式,在多层结构的Clean room中,与为使 WIP 搬送的 Lift功能一起,能够储存 WIP 而设计的System是 Interflow Stocker。
Interflow Stocker是 上,下层 Cleanroom间的自动出库有Auto In-Out OHT Port构成
遵守 Cleanroom Standard(FED-209E) 和 SEMI E88(Stocker SEM) Standard。

  • Specification
  • Features and Benefits

Compact Footprint

Available in configurations minimized module size.
Full use of vertical space.

High speed Up/Down Speed

High speed robot move with high speed lifting time.

Standards

Compliance with current SEMI standards ensures interoperation with other cleanroom equipment.

Auto teaching & Auto alignment

When installing the Stocker system is very short and easy.
Crane robot has the automatic teaching function.
When the Crane robot stores FOUP in shelf, Crane robot has she self alignment function.

Communication

SECS / HSMS / GEM compatible

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