AMHS for Display Production Fab

Clean Stocker (OLED & TFT-LCD)

  • Introduction

Display用 Clean Stocker是根据每个工程的特性,为符合产品性能和Cleanroom 环境,按照 Stocker的 定制 (Customizing)设计。
此外 还可以将 Display Fab的特性 EQ In-Line作为基本,Stocker的功能不仅可以同时储存 WIP(Work In Process),还可以同时具有搬送的功能,
而且可以再载流量多的情况下,还可以同时适用Dual Crane。
Clean Stocker 采用 CPS(Contactless Power Supply) 通过非接触电源供应,体现高速搬送,遵守Cleanroom Standard(FED-209E) 和 SEMI E88(Stocker SEM) Standard。

  • Specification
  • Features and Benefits

High-Density Storage

Available in minimized Dead space, maximizing storage capacity in efficiency footprint.

Meets Industry standards

Compliance with SEMI standards ensures interoperability with other cleanroom equipment.

Communication

SECS / HSMS / GEM compatible

OHT(Over Head Hoist Transport) System

  • Introduction

Display用 OHT System 的目的是,实时掌握各工程的 WIP(Work In Process)各 Process的优先顺序,并将其传送出去。
由于Display Fab的特性上,有很多人将高荷重用Cassette转移,因此很多情况下适用 Single Rail。
由于最近在 OLED 产业中 Rigid OLED, Flexible OLED, Foldable OLED 等多种产品的工序细分,要求有较为灵活的搬送系统,因此底端重用 Dual Rail type OHT System的效用正在逐渐增大。
OHT System时在 Cleanroom内 通过天花板传输方式,所以通过CPS(Contactless Power Supply) 非接触式电源 体现高速搬送, 遵守Cleanroom Standard(FED-209E) 和 SEMI E82(IBSEM) Standard。

  • Specification
  • Features and Benefits

Easy to Expand Module design

Module design lets you add branch rail for no downtime.(Bypass & Blocking routing by OHTC)

Real time scheduling

Allows to assign priority vehicle dispatch for process priority and line issues

Shortest routing algorism

Intelligent shortest routing path, minimized delivery time.

Maximized throughput

High-speed vehicle transport time.

Communication

SECS / HSMS / GEM compatible

OHS(Over Head Shuttle) System

  • Introduction

Display用 OHS System负责各个工序间Stocker和 Stocker之间的 Cassette移送,主要用于搬送量大的 Array 工程的 Interbay 。
由于Display Fab的特性,Cassette具有外部漏出的形态,因此在适用System时,首先要考虑洁净度。
此外 由于OHS System主要用于移送高速荷重的Cassette,所以在对Ceiling Weight适用前应充分考虑。
OHT System时在 Cleanroom内 通过天花板传输方式,所以通过CPS(Contactless Power Supply) 非接触式电源 体现高速搬送,
遵守Cleanroom Standard(FED-209E) 和 SEMI E82(IBSEM) Standard。

  • Specification
  • Features and Benefits

Real time scheduling

Allows to assign priority vehicle dispatch for process priority and line issues.

Shortest routing algorism

Intelligent shortest routing path, minimized delivery time.

Maximized throughput

High-speed vehicle transport time.

Communication

SECS / HSMS / GEM compatible

OHCV(Over Head Conveyor) System

  • Introduction

OHCV系统负责将每个Stocker和Stocker之间的Cassette移送,Main Fab负责少量的搬送量和Backup搬送、迂回转送等。
从各个工程设备在Stocker内In- line是基本的Layout设计概念来看,Stocker间的OHCV作为Stocker In/Out port,不用另外的CIM,可以直接由STK CIM管理。
由于Fab的特性使Cassette具有外露的形态,因此在采用System时,设置Ceiling FFU或OHCV侧面Partition及下部Suction EFU,还可以采用自身的洁净设计。
OHCV System是Cleanroom内部天花板运输方式,因此基本上适用Cps(contactless power supply), 并体现了非接触性式电源, 遵守cleanroom standard(fed – 209e)。

  • Specification
  • Features and Benefits

Stocker to Stocker Connection

There is no footprint in the form of direct connection between a Stocker and another Stocker, and it is possible to implement time balancing between Stocker with intermediate buffer configuration.

Management

No separate CIM is needed because it is managed by the Stocker itself.

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