Semiconductor AMHS Solution

Semiconductor AMHS Solution

OHT(Over Head Hoist Transport) System

  • Introduction

The 300mm Semiconductor fab consists largely of Interbay and Intrabay. The reason of Bay being used in Interbay and Intrabay is due to complication of the Semiconductor process and repetition of processes being carried out.
Therefore, complex transportation system has been organized to transport goods between each process or equipment.
At present, these requirements were integrated with AMHS to create a single fab solution, which has been developed to suit the specificity of the Semiconductor process.
By integrating Interbay and Intrabay, AMHS has been able to place the Stocker System function on the Path (Track) of OHT to store WIP(Work In Process) for each process. By expanding the storage function to STB (Side Track Buffer) and UTB (under Track Buffer), the reduction of footprint and delivery time are greatly reduced, maximizing transport efficiency.
OHT System is a Ceiling Transport system in the Cleanroom. Therefore we implemented CPS (Contactless Power Supply) to realize high-speed transportation through non-contact power supply. Complying the standards of Cleanroom Standard (FED-209E) and SEMI E82 (IBSEM).

  • Specification
  • Features and Benefits

Non-stop Merge & Diverge

Allows non-stop routing from bay to bay(between Interbay and Intrabay) for delivery time and maximum moves.

Easy to Expand

Module design lets you add branch rail for no downtime.(Bypass & Blocking routing by OHTC)

Real time scheduling

Allows to assign priority vehicle dispatch for process priority and line issues Shortest routing algorism Intelligent shortest routing path, minimized delivery time.

Communication

SECS / HSMS / GEM compatible

300mm Stocker System

  • Introduction

Due to the reason of 300mm Semiconductor fab being complicated and performed with repetitive processes, Ample WIP (Work In Process) is stored in the Fab for a complete cycle to run due to different Process time.
This allows each process equipment to achieve maximum efficiency (maximum production capacity).
The 300mm Stocker System for WIP storage has the function of storing and downloading functions of operator and WIP through the interface function through OHT and auto in-out port and manual port.
Recently, according to the expansion to 300mm One Fab Solution the WIP storage function has been distributed as STB (Side Track Buffer) and UTB (Under Track Buffer). According to the development of ultrafine process technology, N2 purge function is applied to prevent contamination of wafer in FOUP. Complying the standards of Cleanroom Standard (FED-209E) and SEMI E88 (Stocker SEM).

  • Specification
  • Features and Benefits

Compact Footprint

Available in configurations up to 4.2 x 5m module.
Minimized dead space and full use of vertical space.

High Cycle time

High speed robot move with 12second average cycle time (4.2m x 5mH standard module, 120cell base)

Standards

Compliance with current SEMI standards ensures interoperation with other cleanroom equipment.

Automatic teaching & alignment

When installing the Stocker system is very short and easy.
Crane robot has the auto teaching function.
When the Crane robot stores FOUP in shelf, Crane robot has self alignment function.

Communication

SECS / HSMS / GEM compatible

Interflow Stocker System

  • Introduction

Due to the complexity of the process 300mm Semiconductor Fab, it is common to construct a Cleanroom with multiple layers for efficient arrangement of process EQ.
Cleanroom is seeking for various ways to utilize the maximum footprint. As an alternative, Interflow Stocker is a system designed to store WIP with Lift function for WIP transportation in Cleanroom in a multi-layer structure.
Interflow Stocker is composed of Auto In-Out OHT Port for automatic In-Out of upper and lower layer of the Cleanroom.
Complying standards of Cleanroom Standard (FED-209E) and SEMI E88 (Stocker SEM).

  • Specification
  • Features and Benefits

Compact Footprint

Available in configurations minimized module size.
Full use of vertical space.

High speed Up/Down Speed

High speed robot move with high speed lifting time.

Standards

Compliance with current SEMI standards ensures interoperation with other cleanroom equipment.

Auto teaching & Auto alignment

When installing the Stocker system is very short and easy.
Crane robot has the automatic teaching function.
When the Crane robot stores FOUP in shelf, Crane robot has she self alignment function.

Communication

SECS / HSMS / GEM compatible

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