AMHS for Display Production Fab

Clean Stocker (OLED & TFT-LCD)

  • Introduction

Clean Stocker for Displaying is customized for each stocker according to the product performance and cleanroom environment in each process.
In addition, EQ In-Line, which is a characteristic of Display Fab, can be used as a base to perform the function of a stocker as well as the storage of WIP (Work In Process).
 Clean Stocker uses CPS (Contactless Power Supply) to implement high-speed transportation through non-contact power supply, complying standards of Cleanroom Standard (FED-209E) and SEMI E88 (Stocker SEM).

  • Specification
  • Features and Benefits

High-Density Storage

Available in minimized Dead space, maximizing storage capacity in efficiency footprint.

Meets Industry standards

Compliance with SEMI standards ensures interoperability with other cleanroom equipment.

Communication

SECS / HSMS / GEM compatible

OHT(Over Head Hoist Transport) System

  • Introduction

OHT System for Displaying aims primarily to check WIP (Work In Process) for each process in real time and to transfer the priority of each process.
Due to the characteristics of the Display Fab, it is often the case that high-load cassettes are transported, so single rail is often applied.
In recent years, more flexible transport systems have been demanded in the OLED industry due to the subdivision of various products such as rigid OLED, flexible OLED, and foldable OLED, and thus the utility of the dual rail type OHT system in lowering is gradually increasing.
Since the OHT system is a ceiling transportation system in the Cleanroom, it basically implements CPS (Contactless Power Supply) to realize high-speed transportation through non-contact power supply, complying standards of Cleanroom Standard (FED-209E) and SEMI E82 (IBSEM).

  • Specification
  • Features and Benefits

Easy to Expand Module design

Module design lets you add branch rail for no downtime.(Bypass & Blocking routing by OHTC)

Real time scheduling

Allows to assign priority vehicle dispatch for process priority and line issues

Shortest routing algorism

Intelligent shortest routing path, minimized delivery time.

Maximized throughput

High-speed vehicle transport time.

Communication

SECS / HSMS / GEM compatible

OHS(Over Head Shuttle) System

  • Introduction

The OHS System for Displaying is responsible in the transfer of cassettes between a Stocker and another Stocker in between each process and is mainly used in Interbay of Array process, which has a large amount of transfer.
Cleanliness should be the primary consideration due to the Cassette being exposed to the outside to the nature of the display fab.
Also, the OHS system is mainly used for high-load cassette transfer, so it should be considered sufficiently before applying to Ceiling Weight.
Since OHS System is Ceiling Transport in Cleanroom, it basically implements CPS (Contactless Power Supply) to achieve high-speed transportation, complying standards of Cleanroom Standard (FED-209E) and SEMI E82 (IBSEM).

  • Specification
  • Features and Benefits

Real time scheduling

Allows to assign priority vehicle dispatch for process priority and line issues.

Shortest routing algorism

Intelligent shortest routing path, minimized delivery time.

Maximized throughput

High-speed vehicle transport time.

Communication

SECS / HSMS / GEM compatible

OHCV(Over Head Conveyor) System

  • Introduction

The OHCV system is responsible in transporting the cassette between each Stocker and another Stocker, In the Main Fab it is responsible in small volume transportation, backup transportation and return transportation.
When each process equipment are in-line in stocker as a basic layout design concept, Stocker inter-OHCV is treated as Stocker In / Out port and can be directly managed in STK CIM without using CIM separately.
Due to the nature of the Fab, the Cassette is exposed to the outside, so the Ceiling FFU or OHCV side Partition and the lower Suction EFU can be installed to apply the cleanliness design.
Since the OHCV system is a ceiling transportation system in the cleanroom, it basically applies contactless power supply (CPS) to implement non-contact power supply, complying standard of Cleanroom (FED-209E).

  • Specification
  • Features and Benefits

Stocker to Stocker Connection

There is no footprint in the form of direct connection between a Stocker and another Stocker, and it is possible to implement time balancing between Stocker with intermediate buffer configuration.

Management

No separate CIM is needed because it is managed by the Stocker itself.

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